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Price list of rebuilt,refurbished, vacuum pumps,dry pumps,turbo pumps,boosters and vacuum pump blowers.

Alcatel Turbo Pumps

ATP-150	$5,000.00	5150CP	$3,000.00
5400	$4,700.00	5402CP	$4,850.00
5402CIS	$4,850.00	ATH-400M	$5,900.00
ATH-1600M	$18,000.00	ATH-2300M	$19,000.00
ATH 1000 M	Call for Price.	ATH 300	Call for Price.
ATH 30 +	Call for Price.	ATH 20/40	Call for Price.
ATS 200	Call for Price.	ATP 1500 M/C	Call for Price.
ATP 900	Call for Price.	ATP 80	Call for Price.
5402 CP	Call for Price.	5402	Call for Price.
5401 CP	Call for Price.	5401	Call for Price.
5400 CP	Call for Price.	5400	Call for Price.
5150 CP	Call for Price.	5150	Call for Price.
5101	Call for Price.	5081	Call for Price.
5402 CP	Call for Price.	5080	Call for Price.

Alcatel Turbo Pump Controllers

CFF-450	$1,150.00	CFV-100	$1,500.00
CFV-900	$1,100.00	ACT-600	$2,550.00
ACT-1300M	$4,500.00	CFV 100	Call for Price.
ACT 600 T	Call for Price.	ACT 1000 T	Call for Price.
ACT 1000 M	Call for Price.	Guardian ADP	Call for Price.

Pfeiffer / Balzers Turbo Pumps

Both TPH(ISO Flange) & TPU (Conflat Flange) Offered

TPH-040	$2,100.00	TPH/U-050	$2,400.00
TPH/U-060	$2,600.00	TPH/U-062	$2,700.00
TMH/U-062	$2,700.00	TPH/U 064	$2,800.00
TMH/U-064	$2,800.00	TMH/U-065	$2,800.00
TPH-110	$2,300.00	TPH/U-170	$3,200.00
TPU-180H	$3,700.00	TPH-240	$3,750.00
TPU-240C	$3,900.00	TPH-260	$3,750.00
TMH/U-260	$4,300.00	TMU-260C	$6,250.00
TMH-261	$5,000.00	TPH/U-330	$4,600.00
TPH/U-510	$6,500.00	TMH-520	$13,250.00
TMU-521P	$13,000.00	TMU-1001P	$14,500.00
TPH-1600	$16,000.00	TPH-1600C	$18,000.00
TMH-1600PC	$21,000.00	TMH-1601	$19,000.00
TPH-2101PC	$22,500.00	TMH 1601PCHT	Call for Price.
TMH 1601PCH	Call for Price.	TMH 1601P	Call for Price.
TMH 521UP	Call for Price.	TMH 521	Call for Price.
TMH 520P	Call for Price.	TMH 520M	Call for Price.
TMH 262	Call for Price.	TMH 261P	Call for Price.
TPH 5000	Call for Price.	TPH 2200U	Call for Price.
TPH 2101PC	Call for Price.	TPH 2100	Call for Price.
TPH 1600F	Call for Price.	TPH 1500	Call for Price.
TPH 521PC	Call for Price.	TPH 520M	Call for Price.
TPH 330	Call for Price.	TPH 190	Call for Price.
TPU 1500	Call for Price.	TPU 180HC	Call for Price.

Pfeiffer / Balzers Turbo Pump Controllers

TCP-015	$1,050.00	TCP-040	$1,000.00
TCP-120	$1,000.00	TCP-121	$1,400.00
TCP-300	$1,250.00	TCP-380	$2,000.00
TCP-310	$1,550.00	TCP-600	$2,200.00
TCP 380	Call for Price.	TCP 270	Call for Price.
TPS 600	Call for Price.	TCP 5000	Call for Price.

Ebara Turbo Pump

ET-300WS	$5,000.00	305W	$5,000.00
ET-600WS	$6,000.00	ET-800WS	$7,000.00
ET-1600WS	Call for Price.	ET2500WS	Call for Price.

Ebara Turbo Pump Controllers

305W	$4,000.00	804W-A	$4,200.00
306W-TF	$6,000.00	ET300W	$7,000.00
ET600W	Call for Price.	ET1604W	Call for Price.
ET1606W-TF	Call for Price.	2506W-TF	Call for Price.

Edwards Turbo Pump

EXT-70	$2,650.00	EXT-250	$4,100.00
EXT-250C	$4,300.00	EXT-250H	$4,500.00
EXT-250HI	$4,500.00	EXT-351	$5,000.00
EXT-501E	$6,000.00	ETP 100/300	$2,550.00
EXT 70H	$4,500.00	EXT 70CF	Call for Price.
EXT 255H	Call for Price.	EXT 255HI	Call for Price.
EXT 260	Call for Price.	EXT-351	Call for Price.

Edwards Turbo Pump Controllers

EXC-100E	$1,000.00	EXC-120	$1,600.00
EXC-300	$1,875.00	EXC 100L	Call for Price.

Varian Turbo Pumps

V-60	$2,100.00	V-70	$2,400.00
V-70 D	$2,500.00	V-70 LP	$2,600.00
V-80	$2,200.00	V-200	$2,600.00
V-250	$3,350.00	V-300	$3,200.00
V-300 HT	$3,800.00	V-300 ICE	$4,000.00
V-450	$3,500.00	V-550	$6,000.00
V-551 Navigator	$6,875.00	V-1000 HT	$7,000.00
V-1000 ICE	$8,000.00	V-60	Call for Price.
V-80 A	Call for Price.	V-150 HT	Call for Price.
V-700 HT	Call for Price.	V-1800	Call for Price.
V-1800A	Call for Price.	V-2000 HT	Call for Price.
TV-1001	Call for Price.	TV-701	Call for Price.
TV-551	Call for Price.	TV-301	Call for Price.
TV2KG	Call for Price.	TV-141	Call for Price.

Leybold Turbo Pumps

TMP-50	$2,300.00	TMP-150	$2,800.00
TMP-151	$3,800.00	TMP-250	$3,600.00
HY.CONE-250 w/Turbo S Drive	$4,100.00	TMP-340MC/T	$5,200.00
TMP-341MC/T	$5,250.00	TMP-360	$5,000.00
TMP-361C	$6,700.00	MAG-400	$7,000.00
MAG-410	$7,000.00	TMP-450C	$4,500.00
TMP-600	$8,500.00	TMP-1000C	$10,750.00
MAG-2000	$13,000.00	MAG-2010	$13,000.00
TMP 1600	Call for Price.	TMP 2001	Call for Price.
MAG W 1500	Call for Price.	MAG W 2010C	Call for Price.
MAG 2700	Call for Price.	MAG W 3200	Call for Price.
TW 700	Call for Price.	TW 701	Call for Price.
MAG W 830	Call for Price.	MAG 1200	Call for Price.
MAG 1300	Call for Price.	MAG W 1300	Call for Price.

Leybold TurbovacTurbomolecular vacuum pump prices and models: TMP50, TMP151, TMP151C, TMP361, TMP361C, TMP600, TMP600C, TMP1000, TMP1000C -T1100 - Turbovac models: TMP340, TMP340M, TMP340MC, TMP340MCT, and TMP341MCT - Turbovac TW250S - Turbovac TW700 - MAG 2000 W2000 - MAG W2000 W2010C - MAG W2000 W2010CHT

Leybold Turbo Pump Controllers

NT-20	$1,500.00	NT-50	$1,400.00
NT-150/360	$1,250.00	NT-340	$1,300.00
NT-450	$1,250.00	NT-1000/1500	$1,650.00
MAG 2000	Call for Price.	100/250	Call for Price.
CT 200	Call for Price.	FAS DRIVE digital	Call for Price.
FRC/S	Call for Price.	MAG DRIVE digital	Call for Price.
MAG DRIVE L2	Call for Price.	MAG DRIVE 1000	Call for Price.
MAG DRIVE 2000	Call for Price.	MAG DRIVE 2700	Call for Price.
SDU	Call for Price.	TURBO DRIVE S	Call for Price.

Seiko Seiki Turbo Pumps

STP-200	$5,800.00	STP-301CB1	$12,000.00
STP-400	$8,500.00	STP-H1000C	$20,000.00
STP-H1301	$20,000.00	STP-A2203P1	$23,000.00
STP-300C	Call for Price.	STP-300H	Call for Price.
STP-451	Call for Price.	STP-451C	Call for Price.
STP-H451C	Call for Price.	STP-600	Call for Price.
STP-H600C	Call for Price.	STP-603	Call for Price.
STP-803	Call for Price.	STP-A803C	Call for Price.
STP-1000	Call for Price.	STP-1000C	Call for Price.
STP-1003C	Call for Price.	STP-H1301C	Call for Price.
STP-H1301	Call for Price.	STP-H1303CV3	Call for Price.
STP-A1303C	Call for Price.	STP-1500	Call for Price.
STP-A1603C	Call for Price.	STP-H2000C	Call for Price.
STP-H2001C	Call for Price.	STP-H2001K2	Call for Price.
STP-H2002C	Call for Price.	STP-A2203	Call for Price.
STP-A2203C	Call for Price.	STP-A2203PV	Call for Price.
STP-F2203C	Call for Price.	STP-A2503PV	Call for Price.

Seiko Seiki Turbo Pump Controllers

SCU-21D	$4,000.00	STP-301CVB3	$4,000.00
STP-1000C	$5,000.00	STPH-1000C	$5,000.00
SCU-301C	Call for Price.	SCU-H301C	Call for Price.
SCU-400	Call for Price.	SCU-600	Call for Price.
SCU-603	Call for Price.	SCU-750	Call for Price.
SCU-1003C	Call for Price.	SCU-1000	Call for Price.
SCU-1000C	Call for Price.	SCU-1000L	Call for Price.
SCU-1000WA	Call for Price.	SCU-1303C	Call for Price.
SCU-1500	Call for Price.	SCU-2000C	Call for Price.
SCU-2001C	Call for Price.	SCU-2002C	Call for Price.
SCU-A2203P	Call for Price.	SCU-A803C	Call for Price.
SCU-A1303CV2	Call for Price.	SCU-A1603C	Call for Price.
SCU-A2503PV	Call for Price.	SCU-XA2703CV	Call for Price.
SCU-XA3203CV	Call for Price.	SCU-XH2603P	Call for Price.
SCU-XL800	Call for Price.	STP-XL800	Call for Price.
STP-XH2603P	Call for Price.	STP-XA3203CV	Call for Price.

Shimadzu Turbo Pumps

TMP-2003	$9,000.00	TMP 1003	Call for Price.
TMP 2001	Specifications: Fully rebuild Leybold Turbovac TMP 340M turbo pump. ISO100/6" CFF, Magnetic Bearing, Water cooling. Pumping speed: N2 - 250 L/S He - 370 L/S H2 - 340 L/S Weight approx.35lbs Typical Applications -Gas analysis systems -Particle accrlerators -Electron beam microscopy -Research instuments and systems Technical Features -Magnetic suspension -Absolutely free of any lubricant -Low noise and vibration levels -Operation in any orientation -Convection cooling -Purge gas design Advantage to the Users -Maintenance-free -Convection cooling -No batteries are required because of integrated generator mode in case of power failures. America One Surplus is a leading supplier of refurbished vacuum pumps. We offer Sales and Service for: - Turbomolecular Pumps - Controllers (frequency converters) - Scroll pumps - Dry (Oil Free) - Rotary Vane (mechanical) pumps - Diffusion, Cryo, Ion, Piston Pumps - Booster Pumps (Blowers) - Leak Detectors. - Our wide access to used vacuum equipment and rebuilding services Provides an additional excellent resource for low-cost solutions. OEM Sales & Service. Warranty on all Pumps, Vacuum equipment, parts and labor. - We Sale & Service: LEYBOLD, ALCATEL, BOC EDWARDS, PFEIFFER, BALZERS, VARIAN, SEIKO SEIKI, STOKES, WELCH, RIGAKU, EBARA, KINNEY, CTI pumps http://www.absolute-vacuum.com/edwards-turbomolecular-pumps.php Turbo vacuum pumps: Edwards (formely known as BOC Edwards) turbomolecular vacuum pumps Edwards EXT turbomolecular pumps and EXC controllers Our range of EXT turbomolecular and compound molecular pumps and EXC Controllers uses state-of-the-art technology to provide reliable, high and ultra high vacuum. Key performance factors A turbomolecular pump (TMP) is a multi-stage axial-flow turbine in which high speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction. The turbomolecular pump is optimized for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump to exhaust to atmosphere. A compound molecular pump (CMP) is based on the concept of combining bladed turbomolecular stages with molecular drag stages on the same rotor. This design allows: • * High critical foreline pressures (typically up to 10 mbar) • * Options to use smaller backing pumps or dry diaphragm backing pumps Pumping speed (volume flow rate) is determined by the rotor diameter, inlet flange size and rotational speed. The pumping speed reduces at high inlet pressures to a value determined by the size of the backing pump. edwards turbo vacuum pumps (top) As the inlet pressure rises, the motor power dissipation and pump temperature increase. Maximum continuous inlet pressure sets the maximum throughput limit for steady state pumping and depends on the cooling method used. Above this pressure, the rotational speed of the pump reduces as temperature sensors limit the pump power. With a water-cooled pump, the actual maximum throughput depends on the size of the backing pump. Quiescent electrical power is the nominal power dissipated by a pump operating normally at full rotational speed and with low gas throughput (inlet pressure below the 10–3 mbar range). During the run-up time, or when operating at high gas throughput or above the critical backing pressure, the pump power dissipation will rise and approach the maximum power output for the EXC Controller used. Critical backing pressure for conventional turbomolecular pumps is approximately 0.1 to 0.2 mbar. Compression ratio is determined by the rotational speed, the number of pump stages and the molecular weight of the pumped gas. It is higher for heavier gases which explains why the suppression of hydrocarbon backstreaming is so effective and why the ratio for hydrogen is important for ultra high vacuum applications. Ultimate pressure measured according to Pneurop standards, is the lowest pressure achieved in the test system, 48 hours after bakeout. The system is backed only by a two-stage rotary vane pump. Fluoroelastomer inlet seals are used with ISO-flanged pumps and metal seals are used with CF-flanged pump models. Bearing and suspension technologies We use two basic technologies: magnetic bearings and mechanical ceramic ball bearings. Ceramic bearings, which are lubricated for life by either grease or oil, have replaced conventional steel bearings. The silicon nitride ceramic balls are lighter, harder and smoother than steel equivalents, leading to longer life and lower vibration characteristics. Reliability is increased because the ball and race materials are different, which prevents micro pitting. Magnetic bearings further increase reliability. Our EXT turbomolecular pumps up to 540 l s-1 use a hybrid bearing arrangement with a permanent magnet upper bearing and an oil lubricated ceramic lower bearing. edwards turbo vacuum pumps (top) Rotor technologies We use two basic technologies: • conventional full stack turbomolecular (typically 12 stages) • compound molecular (combining turbomolecular and drag stages) In addition, EXT pumps up to 540 l s-1 use monobloc rotors machined from solid bar by computer controlled high speed milling machines. This technology produces stable, rigid rotors and allows virtually unlimited design flexibility for optimum vacuum performance. Motor technology EXT pumps use brushless d.c. motors and are available in 24 and 80 volt variants. For the 24 volt pumps the TIC line of controllers are available with the added benefit of integrated instrument controllers. For the 80 volt pumps you can choose from our EXC line of controllers to optimize the performance and cost options for your application. The Controllers incorporate a regenerative back-up supply which provides power in the event of electrical supply failure to keep the ventvalve closed for several minutes. edwards turbo vacuum pumps (top) Corrosive applications For maximum life and reliability in the exacting process conditions encountered in semiconductor wafer processing applications, we recommend that you use turbomolecular pumps from our Edwards STP-C and STPH-C series (see page 2-33). These Maglev pumps have magnetic bearings and are ideal for these harsh duty applications. Purge port The EXT pumps all have purge-ports which can be used to purge the motor and bearing cavity with an inert gas (such as nitrogen). We recommend that you purge the pump when you pump corrosive and abrasive gas mixtures or those with an oxygen content over 20%. You can use our PRX10 purge-restrictor to set the purge gas flow rate. This typically adds up to 25 sccm to the total gas load and the backing pump must be sized accordingly. edwards turbo vacuum pumps (top) Venting To maintain the cleanliness of your vacuum system, we recommend that you vent a turbomolecular pump at or above half rotational speed, when the rotor is still spinning fast enough to suppress any backstreaming of hydrocarbons from the backing line. The vent port on the EXT pump is part way up the rotor stack to ensure maximum cleanliness even with fluoroelastomer sealed vent-valves. Each pump is supplied with a manual vent-valve. If you use this manual valve care must be taken not to open it too quickly, especially if the system volume is small (typically less than the approximate volume of the turbomolecular pump), because if the rate of pressure rise is too high, the pump bearing life may be reduced. In a small volume system, the rate of pressure rise will be greater than in a large volume for a given vent flow rate, and it may be necessary to restrict the vent gas flow. We offer the VRX range of vent restrictors which you can fit to your EXT pump. Since the rate of pressure rise cannot be accurately controlled by the manual vent-valve, we recommend that, unless you fit a suitable VRX restrictor to the vent port, you must wait until the turbomolecular pump has slowed down to 50% speed, as indicated by the controller, before you open the manual vent-valve. The maximum rate of pressure rise varies by pump model, and the Instruction Manual supplied with an EXT pump gives further guidance on this, and the size of vent restrictor needed to meet the fastest pressure rise allowed. Control of the rate of venting is particularly important with pumps using fully magnetic bearings, otherwise the safety bearings may be damaged. The manual vent-valve can be replaced with a TAV solenoid valve driven by the EXC Controller to allow venting after a 2 second delay on shut-off, or delaying vent until the rotational speed has dropped to 50%. The EXC Controller can also control the TAV vent-valve in the event of power or pump failure. You can choose from two solenoid vent-valve options; the TAV5 which covers most auto-venting applications, and the TAV6 which has a higher conductance than the TAV5 and is designed either for use on larger chambers (typically with a volume greater than 10 liters), or when you want to use a two-stage venting procedure for the fastest possible vent times. For two-stage venting you need two TAV valves. By using the appropriately restricted flow for the first stage vent-valve you can start venting when the EXT pump is still at full rotational speed. Once the pump has slowed to half rotational speed you can then introduce higher flow rates from the second stage vent-valve. edwards turbo vacuum pumps (top) Inlet-screen An inlet-screen is fitted as standard to all EXT pumps. The inlet-screen prevents debris from falling into the pump-inlet. In addition, the inlet-screen prevents you from coming into contact with the blades of the pump when it is disconnected from your vacuum system. Cooling For most applications, we recommend that you use forced-air cooling with the appropriate ACX air-cooler connected to your EXT pump. NB: high gas load, high backing pressure and rapid cycling require more cooling. However, if the ambient temperature is above 35 °C you must water-cool the EXT. The barbed connectors on the water-cooler are suitable for 6 mm internal diameter hose. Water cooling reduces the running temperature of the pump motor and bearings and is particularly recommended when you operate the EXT with a continuous high throughput (that is, inlet pressure above 1 x 10-3 mbar) or when you bake the EXT pump to above 70 °C (measured at the inlet flange). Scope of supply For end users desiring front panel controls and indications when using an 80 volt pump a minimum operating system requires you to order an EXT pump, an EXC controller and a pump to controller cable. For a 24 volt pump a minimum operating system requires you to order an EXT pump, a TIC controller and an EXDC controller. (The EXDC controller is not required when using an EXT75DX or EXT255DX). Each EXT pump is supplied with an inlet-screen, elastomer inlet seal or copper gasket (as appropriate), manual vent valve and water-cooler. EXT75DX, EXT255DX and EXT556H require a water-cooler accessory in addition (if required). Each EXC/TIC controller is supplied with a 2 m unterminated electrical supply cable. edwards turbo vacuum pumps (top) Edwards 3000 vacuum pump Edwards 1900 vacuum pump Edwards GV400 vacuum pump Edwards Blowers (Rootes pumps) Full parts and spares list Edwards Blowers (Rootes pumps): Edwards e2m2 vacuum pump Edwards e1m5 vacuum pump Edwards e2m5 vacuum pump Edwards e1m8 vacuum pump Edwards e2m8 vacuum pump Edwards e2m12 vacuum pump Edwards e1m18 vacuum pump Edwards e2m18 vacuum pump Edwards e2m28 vacuum pump Edwards e2m30 vacuum pump Edwards e1m40 vacuum pump Edwards e2m40 vacuum pump Edwards e1m80 vacuum pump Edwards e2m80 vacuum pump Edwards e1m175 vacuum pump Edwards e2m175 vacuum pump Edwards e1m275 vacuum pump Edwards e2m275 vacuum pump EH250 blower EH500A blower EH1200 blower EH2600 blower EH4200 blower Edwards Turbo pumps Edwards Speedivalves Edwards Vacuum pumps: RV3 Vacuum pump RV5 Vacuum pump RV8 Vacuum pump RV12 Vacuum pump Edwards Hook and claw pumps Edwards scroll pumps Edwards GV Series Edwards GVM Series Edwards EM Series Oil pumps Edwards drystar pumps Edwards vacuum oils: edwards 8A oil edwards supergrade A edwards 17 oil edwards 20 oil edwards 16 oil edwards 18 oil edwards ultragrade 15 edwards ultragrade 19 edwards ultragrade 20 edwards ultragrade 70 edwards 45 grade oil	3203 LMC	Service & Repairs of Turbo pumps and controllers (frequency converters),High Vacuum Pumps (ion,turbo,diffusion,cryo,mechanical,dry,scroll,rotary vane,mechanical boosters) & Leak Detectors. 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3403 LMTC	TMH 1001 PCH: TMH 1001 PCH, Turbomolecular drag pump with TC 600, DN 200 ISO-K Characteristics: TMH 1001 PCH Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 6 mbar,Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , <10-8. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Diaphragm pumps for small volumes, rotary vane pumps for large volumes. Flanges: Flange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF TMH 1601 PCH: TMH 1601 PCH, Turbomolecular drag pump with TC 600, DN 250 ISO-K Characteristics: TMH 1601 PCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 24 mbar l/s, Fore Vacuum max. for N2 4 mbar, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Highest critical backing pressure: maximum gas flow, even with the smallest backing pump. Low cost of ownership. Flanges: Flange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz Click to enlarge TMU 1001 PCH: TMU 1001 PCH, Turbomolecular drag pump with TC 600, DN 200 CF-F Characteristics: TMU 1001 PCH Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 6 mbar, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. The temperature management system prevents the sublimation of substances in the pump. Flanges: Flange (in): DN 200 CF-F Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Storage media - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz TMU 1601 PCH: TMH 1601 PCH, Turbomolecular drag pump with TC 600, DN 250 CF-F Characteristics: TMU 1601 PCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump, < 1·10-8 mbar, Gas throughput for N2 24 mbar l/s, Fore Vacuum max. for N2 4,3 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Highest critical backing pressure: maximum gas flow, even with the smallest backing pump Low cost of ownership. Flanges: Flange (in): DN 250 CF-F Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz Click to enlarge TPH 2101 PC: Turbomolecular pump with TC 750 and sealing gas connection, DN 200 ISO-K Characteristics: TPH 2101 PC Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 1,5 mbar, Sealing gas connection: yes. The gas throughput is measured at HV-pressure of 0.1 mbar and backing pump DUO 120. Cooling water quantity is measured at max. gas throughput. REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Maximum operational reliability. Mounts in any orientation. Compact High H2 pumping speed. Low cost of ownership Flanges: Flange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF 230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF 208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF 400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz, 460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF 200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Compact dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Compact dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Compact dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Compact dry pump, vertical operation, for light duty processes TPH 2201: CTPH 2201 C, Turbomolecular pump, HV-flange above, DN 250 ISO-K Characteristics: TPH 2201 Pumping speed: for N2 2100l/s Ultimate pressure with rotary vane pump < 1·10-8mbar Gas throughput for N2 5mbar l/sFinal pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , <10-8. Cooling water quantity is measured at max. gas throughput.The gas throughputs are valid for 100% speed. Higher gas throughputs with lower speed possible.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. HV-flange above. The work horse of the turbopump industry with the newest drive concept. Proven under the most demanding conditions in semiconductor production. Flanges: FlangesFlange (in): DN 250 ISO-K Flange (out): DN 63 ISO-K Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Sputtering - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Click to enlarge TPH 2301 PC: The 2000 l/s high gas load turbo pump,with TC 750 and sealing gas connection, DN 200 ISO-K Characteristics: TPH 2301 PC Pumping speed: for N2 1550 l/s, Ultimate pressure with OnTool DryPumpTM < 1·10-8 mbar, Gas throughput at full rotational speed for N2 22 mbar l/s, Gas throughput at 0.1 mbar HV for N2, 34 mbar l/s, Fore Vacuum max. for N2 2 mbar, Sealing gas connection: yes, The gas througput is measured with 120 m3 (70 cfm) backing pump.Cooling water quantity is measured at max. gas throughput.The gas throughput is measured at HV-pressure of 0.1 mbar and backing pump DUO 120.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest compression ratio for light gases combined with high Argon gasload due to advanced rotor design. Flanges: FlangesFlange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Semiconductor technology - Vacuum process technology - Research, Development and Scientific Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz,460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Compact dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Compact dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Compact dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Compact dry pump, vertical operation, TPH 261 PC: TPH 261 PC, Turbomolecular pump with TC 600, DN 100 ISO-K Characteristics: TPH 261 PC Pumping speed: for N2 175 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 3 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput.First fill of Fomblin oil is included.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Rotary vane pumps for large volumes. Flanges: FlangesFlange (in): DN 100 ISO-K Flange (out): DN 25 ISO-KF Areas of Applications: - Thin film technology - Storage media - Analytical - Gas analysis - Semiconductor technology - Defect analysis - Ion implantation - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. TPH 521 PC: TPH 521 PC, Turbomolecular pump with TC 600, DN 160 ISO-K Characteristics: TPH 521 PC Pumping speed: for N2 430 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 8 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Maximizes up-time and reliability in typical applications in the semiconductor and coating technology industries. Flanges: FlangesFlange (in): DN 160 ISO-K Flange (out): DN 25 ISO-K Areas of Applications: - Thin film technology - Storage media - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Click to enlarge TPH 2301 P: The 2000 l/s high gas load turbo pump, with TC 750 and sealing gas connection, DN 250 ISO-K Characteristics: TPH 2301 P Pumping speed: for N2 1900 l/s, Ultimate pressure with OnTool DryPumpTM < 1·10-8 mbar, Gas throughput at full rotational speed for N2 22 mbar l/s, Gas throughput at 0.1 mbar HV for N2 34 mbar l/s, Fore Vacuum max. for N2 2 mbar, Sealing gas connection: yes, The gas througput is measured with 120 m3 (70 cfm) backing pump. Cooling water quantity is measured at max. gas throughput. High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Highest compression ratio for light gases combined with high Argon gasload due to advanced rotor design. Flanges: Flange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Semiconductor technology - Vacuum process technology - Research, Development and Scientific Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF 230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF 208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF 400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz, 460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF 200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Corrosive dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Corrosive dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Corrosive dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Corrosive dry pump, vertical operation, for light duty processes Click to enlarge TMH 1000 MPCT: TTMH 1000 MPCT, Turbomolecular drag pump, with TMS, DN 200 ISO-K Characteristics: TMH 1000 MPCT umping speed: for N2 990 l/s, Utimate pressure with rotary vane pump < 5·10-10 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 20 mbar l/s, Temperature Management System (TMS): yes, Venting valve integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard), < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. Vacuum is about 10% lower by oprating TMS. REQUIRED BACKING PUMPS FOR CORROSIVE GASES ACCORDING TO APPLICATIONS ON REQUEST. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps for corrosive gas operation offers hydrocarbon and maintenance-free operation with unlimited installation orientation. High gas throughput even with small backing pump volume flow rates. Flanges: FlangesFlange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Optical coatings - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Research, Development and Scientific - Plasma physics Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge TMH 1600 MPCH: TMH 1600 MPCH, Turbomolecular drag pump, DN 250 ISO-K Characteristics: TMH 1600 MPCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 20 mbar l/s Temperature Management System (TMS) no, Venting valve integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard), < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. REQUIRED BACKING PUMPS FOR CORROSIVE GASES ACCORDING TO APPLICATIONS ON REQUEST. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps for corrosive gas operation offers hydrocarbon and maintenance-free operations with unlimited installation orientation. High gas throughput even with smallest backing pump volume flow rates. Flanges: FlangesFlange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Optical coatings - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Research, Development and Scientific - Plasma physics Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT10804 - UniDryTM 050-3, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10805 - UniDryTM 050-3, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz	3403 LMC	TMH 1001 PCH: TMH 1001 PCH, Turbomolecular drag pump with TC 600, DN 200 ISO-K Characteristics: TMH 1001 PCH Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 6 mbar,Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , <10-8. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Diaphragm pumps for small volumes, rotary vane pumps for large volumes. Flanges: Flange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF TMH 1601 PCH: TMH 1601 PCH, Turbomolecular drag pump with TC 600, DN 250 ISO-K Characteristics: TMH 1601 PCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 24 mbar l/s, Fore Vacuum max. for N2 4 mbar, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Highest critical backing pressure: maximum gas flow, even with the smallest backing pump. Low cost of ownership. Flanges: Flange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz Click to enlarge TMU 1001 PCH: TMU 1001 PCH, Turbomolecular drag pump with TC 600, DN 200 CF-F Characteristics: TMU 1001 PCH Pumping speed: for N2 950 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 6 mbar, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. The temperature management system prevents the sublimation of substances in the pump. Flanges: Flange (in): DN 200 CF-F Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Storage media - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz TMU 1601 PCH: TMH 1601 PCH, Turbomolecular drag pump with TC 600, DN 250 CF-F Characteristics: TMU 1601 PCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Ultimate pressure with diaphragm pump, < 1·10-8 mbar, Gas throughput for N2 24 mbar l/s, Fore Vacuum max. for N2 4,3 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. ADDITIONAL REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Highest critical backing pressure: maximum gas flow, even with the smallest backing pump Low cost of ownership. Flanges: Flange (in): DN 250 CF-F Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKT01350 - MVP 055-3 C, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT01450 - MVP 160-3 C, Diaphragm pump, 230 V +/- 10 %, 50/60 Hz PKT01451 - MVP 160-3 C, Diaphragm pump, 120V + 5% /- 10 %, 60 Hz Click to enlarge TPH 2101 PC: Turbomolecular pump with TC 750 and sealing gas connection, DN 200 ISO-K Characteristics: TPH 2101 PC Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 25 mbar l/s, Fore Vacuum max. for N2 1,5 mbar, Sealing gas connection: yes. The gas throughput is measured at HV-pressure of 0.1 mbar and backing pump DUO 120. Cooling water quantity is measured at max. gas throughput. REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. High pumping speed. Maximum operational reliability. Mounts in any orientation. Compact High H2 pumping speed. Low cost of ownership Flanges: Flange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF 230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF 208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF 400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz, 460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF 200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Compact dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Compact dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Compact dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Compact dry pump, vertical operation, for light duty processes TPH 2201: CTPH 2201 C, Turbomolecular pump, HV-flange above, DN 250 ISO-K Characteristics: TPH 2201 Pumping speed: for N2 2100l/s Ultimate pressure with rotary vane pump < 1·10-8mbar Gas throughput for N2 5mbar l/sFinal pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard) , <10-8. Cooling water quantity is measured at max. gas throughput.The gas throughputs are valid for 100% speed. Higher gas throughputs with lower speed possible.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. HV-flange above. The work horse of the turbopump industry with the newest drive concept. Proven under the most demanding conditions in semiconductor production. Flanges: FlangesFlange (in): DN 250 ISO-K Flange (out): DN 63 ISO-K Areas of Applications: - Thin film technology - Tool coating - Process technology - Metallurgy - Semiconductor technology - Sputtering - Vacuum process technology - Glass coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Click to enlarge TPH 2301 PC: The 2000 l/s high gas load turbo pump,with TC 750 and sealing gas connection, DN 200 ISO-K Characteristics: TPH 2301 PC Pumping speed: for N2 1550 l/s, Ultimate pressure with OnTool DryPumpTM < 1·10-8 mbar, Gas throughput at full rotational speed for N2 22 mbar l/s, Gas throughput at 0.1 mbar HV for N2, 34 mbar l/s, Fore Vacuum max. for N2 2 mbar, Sealing gas connection: yes, The gas througput is measured with 120 m3 (70 cfm) backing pump.Cooling water quantity is measured at max. gas throughput.The gas throughput is measured at HV-pressure of 0.1 mbar and backing pump DUO 120.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest compression ratio for light gases combined with high Argon gasload due to advanced rotor design. Flanges: FlangesFlange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Semiconductor technology - Vacuum process technology - Research, Development and Scientific Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz,460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Compact dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Compact dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Compact dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Compact dry pump, vertical operation, TPH 261 PC: TPH 261 PC, Turbomolecular pump with TC 600, DN 100 ISO-K Characteristics: TPH 261 PC Pumping speed: for N2 175 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 3 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput.First fill of Fomblin oil is included.REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Rotary vane pumps for large volumes. Flanges: FlangesFlange (in): DN 100 ISO-K Flange (out): DN 25 ISO-KF Areas of Applications: - Thin film technology - Storage media - Analytical - Gas analysis - Semiconductor technology - Defect analysis - Ion implantation - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. TPH 521 PC: TPH 521 PC, Turbomolecular pump with TC 600, DN 160 ISO-K Characteristics: TPH 521 PC Pumping speed: for N2 430 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 8 mbar l/s, The gas throughput is measured at HV-pressure of 0.1 mbar and with sealing gas. Cooling water quantity is measured at max. gas throughput. First fill of Fomblin oil is included. REQUIRED BACKING PUMPS FOR CORROSIVE APPLICATIONS ON REQUEST. Turbopump for high gas throughputs with integrated electronic drive unit / Turbo Controller. Highest gas flows for corrosive gases. Maximizes up-time and reliability in typical applications in the semiconductor and coating technology industries. Flanges: FlangesFlange (in): DN 160 ISO-K Flange (out): DN 25 ISO-K Areas of Applications: - Thin film technology - Storage media - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Click to enlarge TPH 2301 P: The 2000 l/s high gas load turbo pump, with TC 750 and sealing gas connection, DN 250 ISO-K Characteristics: TPH 2301 P Pumping speed: for N2 1900 l/s, Ultimate pressure with OnTool DryPumpTM < 1·10-8 mbar, Gas throughput at full rotational speed for N2 22 mbar l/s, Gas throughput at 0.1 mbar HV for N2 34 mbar l/s, Fore Vacuum max. for N2 2 mbar, Sealing gas connection: yes, The gas througput is measured with 120 m3 (70 cfm) backing pump. Cooling water quantity is measured at max. gas throughput. High compression ratios and improved critical backing pressures for greater economies in fore vacuum. Highest compression ratio for light gases combined with high Argon gasload due to advanced rotor design. Flanges: Flange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Semiconductor technology - Vacuum process technology - Research, Development and Scientific Note: In order to select a suitable backing pump, the turbo pump characteristics and process parameters are to be considered. Similar Products: Suitable backing pumps: PKD26602 - DUO 120, Rotary vane pump, 3-ph Motor, IEC 38, 3TF 230/400 V, 50/60 Hz PKD26652 - DUO 120, Rotary vane pump, 3 phase, IEC 38, 3TF 208/360 V, 50/60 Hz PKD45305 - DUO 35, Rotary vane pump, 3 phase, 3 TF 400 V, 50 Hz PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF 200/346V, 50Hz, 220/380V, 60Hz PKD46305 - DUO 65, Rotary vane pump, 3 phase 400 V. 50Hz, 460 V. 60Hz PKD46602 - DUO 65, Rotary vane pump, 3 phase, 3TF 230/400 V. 50 Hz, 265/460 V. 60 Hz PKD46642 - DUO 65, Rotary vane pump, 3 phase, 3 TF 200/346V, 50 Hz, 220/380V, 60 Hz PKT11800 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11801 - UniDryTM 050-4, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT11804 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT11805 - UniDryTM 050-4, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT16919 - OnTool DryPump? P, Corrosive dry pump, horizontal operation, for harsh duty processes PKT16920 - OnTool DryPump? P, Corrosive dry pump, vertical operation, for harsh duty processes PKT16921 - OnTool DryPump? L, Corrosive dry pump, horizontal operation, for light duty processes PKT16922 - OnTool DryPump? L, Corrosive dry pump, vertical operation, for light duty processes Click to enlarge TMH 1000 MPCT: TTMH 1000 MPCT, Turbomolecular drag pump, with TMS, DN 200 ISO-K Characteristics: TMH 1000 MPCT umping speed: for N2 990 l/s, Utimate pressure with rotary vane pump < 5·10-10 mbar, Ultimate pressure with diaphragm pump < 1·10-8 mbar, Gas throughput for N2 20 mbar l/s, Temperature Management System (TMS): yes, Venting valve integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard), < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. Vacuum is about 10% lower by oprating TMS. REQUIRED BACKING PUMPS FOR CORROSIVE GASES ACCORDING TO APPLICATIONS ON REQUEST. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps for corrosive gas operation offers hydrocarbon and maintenance-free operation with unlimited installation orientation. High gas throughput even with small backing pump volume flow rates. Flanges: FlangesFlange (in): DN 200 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Optical coatings - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Research, Development and Scientific - Plasma physics Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKT01300 - MVP 055-3, Diaphragm pump, 90-126 / 180-254 V, 50/60 Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz Click to enlarge TMH 1600 MPCH: TMH 1600 MPCH, Turbomolecular drag pump, DN 250 ISO-K Characteristics: TMH 1600 MPCH Pumping speed: for N2 1400 l/s, Ultimate pressure with rotary vane pump < 1·10-8 mbar, Gas throughput for N2 20 mbar l/s Temperature Management System (TMS) no, Venting valve integrated, Final pressure only attainable with metallic seals on high vacuum flange. Final pressure with elastomer seals (standard), < 1·10-8 mbar. The gas throughput is measured at HV-pressure of 0.1 mbar. Cooling water quantity is measured at max. gas throughput. REQUIRED BACKING PUMPS FOR CORROSIVE GASES ACCORDING TO APPLICATIONS ON REQUEST. Turbopump with high gas throughputs at economical fore-vacuum. Magnetic bearing turbomolecular pumps for corrosive gas operation offers hydrocarbon and maintenance-free operations with unlimited installation orientation. High gas throughput even with smallest backing pump volume flow rates. Flanges: FlangesFlange (in): DN 250 ISO-K Flange (out): DN 40 ISO-KF Areas of Applications: - Thin film technology - Tool coating - Optical coatings - Semiconductor technology - Defect analysis - Ion implantation - Sputtering - Plasma coating - Vacuum process technology - Research, Development and Scientific - Plasma physics Similar Products: Suitable backing pumps: PKD45602 - DUO 35, Rotary vane pump, 3 phase, 3TF230/400 V. 50 Hz,265/460 V. 60 Hz PKD45642 - DUO 35, Rotary vane pump, 3 phase, 3 TF200/346V, 50Hz,220/380V, 60Hz PKT10800 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10801 - UniDryTM 050-3, for light duty processes, standard motor IP 54, 120/208 V, 60 Hz PKT10804 - UniDryTM 050-3, for medium duty processes, standard motor IP 54, 230/400 V, 50 Hz PKT10805 - UniDryTM 050-3, for medium duty processes, standard motor IP 54, 120/208 V, 60 Hz