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About Us SEIKO SEIKI TURBOMOLECULAR PUMPS SEIKO SEIKI TURBOMOLECULAR PUMPS PRICE,SALES AND SERVICE. http://www.turbopumpseikoseiki.com SEIKO SEIKI TURBOMOLECULAR PUMPS - STP-1003C - STP-H1301C - STP-H1301 - STP-H1303CV3 Edwards STP magnetically levitated turbomolecular pumps Seiko Seiki Turbo Pumps  STP-200 $5,800.00  STP-301CB1 $12,000.00  STP-400 $8,500.00 STP-H1000C $20,000.00  STP-H1301 $20,000.00  STP-A2203P1 $23,000.00   STP-300C Call for Price.  STP-300H Call for Price.  STP-451 Call for Price. STP-451C Call for Price.  STP-H451C Call for Price.  STP-600 Call for Price.  STP-H600C Call for Price.  STP-603 Call for Price.  STP-803 Call for Price. STP-A803C Call for Price.  STP-1000 Call for Price.  STP-1000C Call for Price.  STP-1003C Call for Price.  STP-H1301C Call for Price.  STP-H1301 Call for Price. STP-H1303CV3 Call for Price.  STP-A1303C Call for Price.  STP-1500 Call for Price.  STP-A1603C Call for Price.  STP-H2000C Call for Price.  STP-H2001C Call for Price. STP-H2001K2 Call for Price.  STP-H2002C Call for Price.  STP-A2203 Call for Price.  STP-A2203C Call for Price. STP-A2203PV Call for Price.  STP-F2203C Call for Price.  STP-A2503PV Call for Price. Seiko Seiki Turbo Pump Controllers  SCU-21D $4,000.00 STP-301CVB3  $4,000.00 STP-1000C  $5,000.00 STPH-1000C  $5,000.00  SCU-301C Call for Price.  SCU-H301C Call for Price.  SCU-400 Call for Price. SCU-600 Call for Price.  SCU-603 Call for Price.  SCU-750 Call for Price.  SCU-1003C Call for Price.  SCU-1000 Call for Price.  SCU-1000C Call for Price. SCU-1000L Call for Price.  SCU-1000WA Call for Price.  SCU-1303C Call for Price.  SCU-1500 Call for Price.  SCU-2000C Call for Price.  SCU-2001C Call for Price. SCU-2002C Call for Price.  SCU-A2203P Call for Price.  SCU-A803C Call for Price.  SCU-A1303CV2 Call for Price.  SCU-A1603C Call for Price.  SCU-A2503PV Call for Price. SCU-XA2703CV Call for Price.  SCU-XA3203CV Call for Price.  SCU-XH2603P Call for Price.  SCU-XL800 Call for Price. STP-XL800 Call for Price.  STP-XH2603P Call for Price.  STP-XA3203CV Call for Price. Designed by continuous improvement on existing proven reliable technology Advanced materials and designs provide: Class leading performance Low vibration Guaranteed reliability Low cost of ownership The broad product range covers all potential turbo pump applications. ualified by all major semiconductor OEM’s Used in all major semiconductor fabrication plants Installed base of over 80000 units, 85% in the semiconductor industry Edwards STP magnetically levitated turbomolecular pumps - Key features Multi-axis magnetic bearing system High Throughput versions for high flow processes Low vibration characteristics Advanced controller technology Full interfacing capability Edwards STP magnetically levitated turbomolecular pumps - Features & benefits Improved pumping performance Optimized for semiconductor process pressures Maximized gas throughput for each flange size Applications specific models New generation universal controllers Compact (1/2 rack) controller Auto tune enabling "mix and match" pumps Integrated TMS control Improved diagnostics High power d.c. motor drive Fast ramp-up time Self regeneration upon Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 80000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration. Proven reliability. Clean oil-free high vacuum. Complete range from 300 to 4500 l s-1. Application specific models. Very low noise and vibration. Low cost of ownership. Virtually maintenance free. Installation in any orientation. Full remote control interface. Supported globally by Edwards Proven magnetic bearing technology The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. Edwards STP range Edwards UHV series The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s-1 to 1000 l s-1 all of which are available in ISO or CF flange variants. Edwards High throughput series The high throughput series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system The range operates with throughput speeds from 300 l s-1 to 1300 l s-1. Edwards Advantage series The new Advantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 800 l s-1 to 4500 l s-1. Edwards STP features Edwards Oil free All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements). Maintenance free Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination. Vibration free Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics. Vibration analysis STP300 displacement/frequency Automatic balancing system (ABS) ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds. Safety backup bearings STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation. Optimized rotors The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios. Compound rotors The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure. Advanced series compound rotors The advanced series pumps have a redesigned compound rotor, the materials of manufacture have been improved to reduce the clearances within the pump, the rotors have an advanced 3D design and the Holweck stage has been redesigned to increase the throughput. Corrosion resistant To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request. Nitrogen purging The corrosion resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. TMS system The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life. Edwards STP magnetically levitated turbomolecular pumps - Applications Semiconductor fabrication STP turbomolecular pumps are the number one choice for the world’s leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability. Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon Electron cyclotron resonance (ECR) etch Film deposition CVD, PECVD, ECRCVD, MOCVD Sputtering Ion implantation source, beam line pumping end station MBE Diffusion Photo resist stripping Crystal/epitaxial growth Wafer inspection Load lock chambers Scientific applications STP pumps are used extensively in the world’s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications: Scientific instruments: surface analysis, mass spectrometry, electron microscopy High energy physics: beam lines, accelerators Radioactive applications: fusion systems, cyclotrons Data summary - Edwards STP magnetically levitated turbomolecular pumps Edwards STP-XA4503C turbomolecular pump STP-XA4503C turbomolecular pump Pumping speed l s-1: N2: 3800/4000/4300 H2: 2500 Inlet flange: VG300/ISO320F/VG350 Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9) order CF (not C version): CF (C version only): Rated speed: 24,000 Control unit: Edwards STP-iX455 turbomolecular pump STP-iX455 turbomolecular pump Pumping speed l s-1: N2: 300/450 H2: 300/460 Inlet flange: ISO100K/DN100CF/ISO160K/DN1600CF Ultimate pressure with bake out heating Pa (Torr): ISO:10-8 DN Flange CF (not C version):10-6 ISO Flange CF (C version only): Rated speed: Control unit: Edwards STP301 - STP301C turbomolecular pump STP301/STP301C turbomolecular pump Pumping speed l s-1: N2: 300 H2:300 Inlet flange: ISO100/DN100CF Ultimate pressure with bake out heating Pa (Torr): ISO: 6.5 x 10-6 (5 x 10-8) CF (not C version):10-8 (10-10) order CF (C version only): 10-7 (10-9) order Rated speed: 48,000 Control unit: SCU-301/451 Edwards STP-L301 - STP-L301C turbomolecular pump STP-L301/STP-L301C turbomolecular pump Pumping speed l s-1: N2: 260 H2: 290 Inlet flange: ISO100/DN100CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-6 (108) order CF (not C version): CF (C version only): Rated speed: 48,000 Control unit: SCU-301/451 Edwards STP603 - STP603C turbomolecular pumpPumping speed l s-1: STP603/STP603C turbomolecular pump Pumping speed l s-1: N2: 650 H2: 550 Inlet flange: ISO160F/DN160CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9) order CF (not C version): 10-8 (10-10) order CF (C version only): 6.5 x 10-6 (5 x 10-8) Rated speed: 35,000 Control unit: SCU-750 Edwards STP1003 - STP1003C turbomolecular pump STP1003/STP1003C turbomolecular pump Pumping speed l s-1: N2: 1000 H2: 800 Inlet flange: ISO200F/DN200CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9) order CF (not C version): 10-8 (10-10) order CF (C version only): 6.5 x 10-6 (5 x 10-8) Rated speed: 35,000 Control unit:SCU-750 Edwards STPH301C turbomolecular pump STPH301C high performance turbo pump Pumping speed l s-1: N2: 300 H2: 200 Inlet flange: ISO100K/DN100CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9) order CF (not C version): CF (C version only): Rated speed: 48,000 Control unit: SCU-750 Edwards STPH451C turbomolecular pump STPH451C high performance turbo pump Pumping speed l s-1: N2: 450 H2: 300 Inlet flange: ISO160K/DN160CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9)order CF (not C version): CF (C version only): Rated speed: 48,000 Control unit:SCU-750 Edwards STPA803C turbomolecular pump STPA803C "advantage" turbo pump Pumping speed l s-1: N2: 800 H2: 520 Inlet flange: ISO160F/DN160CF Ultimate pressure with bake out heating Pa (Torr): ISO:  10-7 (10-9) order CF (not C version): CF (C version only): Rated speed: 32,500 Control unit: SCU-750 Edwards STPA1303C turbomolecular pump STPA1303C "advantage" turbo pump Pumping speed l s-1: N2: 1300 H2: 800 Inlet flange: ISO200F/DN200CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 (10-9) order CF (not C version): CF (C version only): Rated speed: 32,500 Control unit:SCU-750 Edwards STPA1603C turbomolecular pump STPA1603C turbomolecular pump Pumping speed l s-1: N2: 1600 H2: 1200 Inlet flange: ISO200F/DN200CF Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 CF (not C version): CF (C version only): Rated speed: 36,500 Control unit: SCU-750 Edwards STPA2203C turbomolecular pump STPA2203C "advantage" turbo pump Pumping speed l s-1: N2: 2200 H2: 1700 Inlet flange: ISO250F/ICF305 Ultimate pressure with bake out heating Pa (Torr): ISO: 10-6 (10-8)order CF (not C version): CF (C version only): Rated speed: 27,000 Control unit: SCU-1500 Edwards STP-XA2703C turbomolecular pump STP-XA2703C turbo pump Pumping speed l s-1: N2: 2650 H2: 2050 Inlet flange: ISO250F/VG250 Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 order CF (not C version): CF (C version only): Rated speed: 27,500 Control unit: SCU-1500 Edwards STP-XA3203C turbomolecular pump STP-XA3203C turbo pump Pumping speed l s-1: N2: 3200 H2: 2300 Inlet flange: ISO320F/VG300 Ultimate pressure with bake out heating Pa (Torr): ISO: 10-7 order CF (not C version): CF (C version only): Rated speed: 27,500 Control unit: SCU-1500 Edwards SCU750 control unit turbomolecular pump Control unit Magnetic bearing control system: Digital control Input voltage: AC100 . 100-120 ± 10% V a.c./AC200 200-240 ± 10% V a.c. Power consumption VA Without TMS: Max 850 With TMS: Max 1200 Input frequency Hz: 50/60 ± 2 Leak current mA: Max 3.5 Input phase: Main breaker rated current A: 10 Motor driving system: Three phase DC brush less motor driver Allowable ambient temperature °C: 0 . 40 Storage temperature °C: -25 . 55 Mass kg: 8.5 TMS control unit: Built in Serial communication function: -  RS232: Standard RS485: Standard Panel display: LCD (20 characters, 2 lines) Edwards SCU-1500 control unit turbomolecular pump Control unit Magnetic bearing control system: Digital control Input Voltage: 200 to 240 ± 10% V a.c. Power consumption VA Without TMS: 1500 With TMS: 2100 Input frequency Hz: 50/60 ± 2 Leak current mA: Max 3.5 Input phase: Single Phase Main breaker rated current A: 15 Motor driving system: Three phase DC brush less motor driver Allowable ambient temperature °C: 0 to 40 Storage temperature °C: -25 to 55 Mass kg: 12 TMS control unit: Built in Serial communication function: RS232: Standard RS485: Standard SEIKO SEIKI Turbo Pumps and controllers:Rebuilt (refurbished) Turbomolecular ( turbo ) vacuum pumps ( turbopumps,turbo pump): REFURBISHED / REBUILT VACUUM PUMPS: Seiko Seiki Turbo Pumps:: Seiko Seiki Turbo Pump model: STP-200 Price:$5,800.00 Seiko Seiki Turbo Pump model: STP-301CB1 Price:$12,000.00 Seiko Seiki Turbo Pump model: STP-400 Price:$8,500.00 Seiko Seiki Turbo Pump model:STP-H1000C Price:$22,000.00 Seiko Seiki Turbo Pump model: STP-H1301 Price:$20,000.00 Seiko Seiki Turbo Pump model: STP-A2203P1 Price:$22,000.00 Seiko Seiki Turbo Pump Controllers:: Seiko Seiki Turbo Pump Controller: SCU-21D Price:$2,000.00 Seiko Seiki Turbo Pump Controller:STP-301CVB3 Price:$1,700.00 Seiko Seiki Turbo Pump Controller:STP-1000C Price:$4,500.00 Seiko Seiki Turbo Pump Controller:STPH-1000C Price:$5,000.00 www.turbopumprepairservice.com - We buy ,sell and rebuild (repair ) Leybold,Seiko Seiki,Edwards,Alcatel,Varian,CTI ,Pfeiffer,vacuum and turbo pumps. We buy vacuumpumps,turbo pumps,turbomolecular,turbopump, ion pumps, cryo pumps, diffusion pumps, vane pumps,oil free pumps, dry pumps, mechanical vacuum pumps and Leak Detectors.www.turbopumprepairservice.com covers USA, San Jose,CA, San Francisco,CA,Phoenix,AZ, Las Vegas,NV and Los Angeles,CA : - Edwards turbomolecular ext rebuild - turbo pump. Turbo Pump Repair Index / Home | Vacuum Pumps | Leak Detectors | Turbo Pumps for Sale | CTI - Cryo Pumps | LEYBOLD Turbo Pumps for sale. | Pfeiffer Turbo pumps for sale. | Varian Turbo pumps for sale. | Alcatel Turbo pumps for sale. | Ebara Turbo pumps for sale. | Seiko Seiki Turbo pumps for sale. The logos and/or trademarks appearing on this website are owned and/or registered to the manufacturers or suppliers of the products. © copyright 2007 Seiko Seiki Turbo Pumps and controllers.Rebuilt (refurbished) Turbomolecular ( turbo ) vacuum pumps ( turbopumps,turbo pump).